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HomeThe certification of a fourth batch of tantalum pentoxide on tantalum foil
BCR-261T
Metapodatki publikacije
This report describes the certification of the fourth batch of the reference material BCR-261T for the determination of oxide layer thickness by a variety of methods. The material is also used for assessing the depth resolving capability of surface analysis instruments when they are used in conjunction with inert gas sputtering. It may also be applied for calibrating the sputtering rate parameters of such instruments. The material has been certified for the oxide thicknesses of two different Ta2O5 layers on tantalum foil and their thickness ratio by comparison measurements with the three previous batches, BCR-261, BCR-261R and BCR-261S.
- Objavljeno:
- Korporativni avtor (-ji): Institute for Reference Materials and Measurements (Skupno raziskovalno središče)
- Področja: Raziskovalna politika in organizacija
- Področje meroslovje , metoda vrednotenja , oksid , surovine , tantal
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| ISSN 1018-5593 | ISBN 92-79-04589-X | DOI | Kataloška številka LA-NA-22610-EN-C |
- Released on EU publications website:
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