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Germany-Mittweida: Miscellaneous special-purpose machinery - EU tenders
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Germany-Mittweida: Miscellaneous special-purpose machinery

Overview
  • Published
    02/07/2014
  • Deadline
    29/08/2014
  • Awarded
    26/09/2014
  • Today
    09/08/2026
Status
Awarded
Type of contract
Supplies
Subject for Renewal
No
Buyer
Hochschule Mittweida
Place of performance
NUTS code: DED43 Mittelsachsen
Location of buyer
NUTS code: Not available
Business sector (Main CPV)
42990000 42990000
Total estimated contract value (excluding VAT)
850,000.00 EUR
Total final contract value (excluding VAT)
849,000.00 EUR
Procedure details
Tender reference number
EU-AS-01/14
Description

An ultra-high vacuum coating system for laser pulse separation (PLD) of thin layers and multilayer systems shall be designed and constructed on the basis of conceptual preparatory work carried out by the contracting authority. The installation is designed to allow the consecutive coating of at least five flat substrates of 4 inches with thick homogeneous, contamination and partial free layers made of 10 different materials in the ultra-high vacuum. It shall be modular, that is to say, one loading and unloading chamber and two coating chambers, with the transport of the substrate to be coated from a substrate magazine in the loading and removal chamber to one of the coating chambers via locks. In coating chamber 1, target and substrate are positioned parallel to each other at a specified distance, as is customary for the PLD process. The coating chamber 2 shall consist of two sub-chambers (target chamber and substrate chamber) with a 90° magnetic coil deflection system in between, so that target and substrate are positioned perpendicularly. Each chamber is equipped with a target changer and a heat and coolable substrate holder with a substrate movement system, so that the two chambers can be recoated independently of each other without alterations. Target (or Targetwechsler) and substrate shall be located on a computer-controlled target/substrate movement system. In addition, ion sources for substrate cleaning, ion shelling of growing layers and clean-up windows for laser beams, as well as an in-situ ellipsometer for the control of shift growth and apparatus (pyrometers and thermocouples) for substrate temperature measurement shall be implemented. In addition, full automatic control of the coating process should be possible. Lasers and optics for the lasers are not part of the tender.

Submission Method
Not available
Tenders may be submitted
Submission for all lots
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
The notice involves a public contract
Conditions for opening tenders (date)
Not available
Place of performance
DED43 Mittelsachsen
CPV code

42990000 - 42990000

38000000 - 38000000

Award method
The most economic tender
Estimated value
850,000.00 EUR
Final contracted value
849,000.00 EUR
Award of contract
Official name: Creavac Creative Vakuumbeschichtung GmbH
Postal address: Löbtauer Straße 65-71
Town: Dresden
Postal code: 01159
Country: DEU
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.