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Single wafer plasma asher tool - EU tenders
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Single wafer plasma asher tool

Overview
  • Published
    16/01/2025
  • Today
    14/05/2026
Status
Canceled
Type of contract
Supplies
Subject for Renewal
No
Buyer
Markkinaoikeus
Place of performance
NUTS code: anyw
Location of buyer
NUTS code: FI1B1 Helsinki-Uusimaa
Business sector (Main CPV)
38000000 Laboratory, optical and precision equipments (excl. glasses)
Total estimated contract value (excluding VAT)
Not available
Total final contract value (excluding VAT)
The procedure is closed
Procedure details
Tender reference number
75/206/2024
Description

The object of the tender process was Single wafer plasma asher tool (later also “Equipment”). The procurement object was a new 200 mm Single Wafer Plasma asher tool for the VTT Micronova cleanroom semiconductor front end. The procurement included a process chamber for Polymer Removal and PR ash. The single-wafer plasma asher tool was for silicon semiconductor front-end, the tool had to be compatible with industry-standard cleanroom requirements, including automated wafer handling, welded gas lines with VCR-gasket construction, particle filters, etc., and CE-compliant, with Emergency shutdown, capable processing of 200 mm including the following processes: Polymer removal PR ash (bulk strip, HDIS, Descums) The Single wafer asher tool will be used in silicon photonics devices, quantum devices, radiation detectors, and MEMS devices, which are the main product lines in the research fab. The object of the tender process was described in more detail in the invitation to tender documents.

Submission Method
Electronic via:
https://tarjouspalvelu.fi/vtt?id=537071&tpk=b60f45a7-42b7-473e-a28f-7412e7cdea54
Tenders may be submitted
Electronic submission: required
https://tarjouspalvelu.fi/vtt?id=537071&tpk=b60f45a7-42b7-473e-a28f-7412e7cdea54
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
23/01/2025 15:05
Place of performance
anyw
CPV code

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Award method
Price
Estimated value
Not available
Final contracted value
The procedure is closed
Award of contract
The procedure is closed
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.