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200 mm coating and developing track tool - EU tenders
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200 mm coating and developing track tool

Overview
  • Published
    20/05/2025
  • Deadline
    16/06/2025
  • Opening of tenders
    16/06/2025
  • Today
    23/06/2025
Status
Submission closed
Type of contract
Supplies
Subject for Renewal
No
Buyer
VTT Technical Research Centre of Finland Ltd
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: FI1B1 Helsinki-Uusimaa
Business sector (Main CPV)
38000000 Laboratory, optical and precision equipments (excl. glasses)
Total estimated contract value (excluding VAT)
Not available
Total final contract value (excluding VAT)
Not available
Procedure details
Tender reference number
VTT 46/206/2025
Description

THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. The object of the tender process is described in more detail in the invitation to tender documents. Partial tenders will not be accepted. OPTIONS (mandatory) The following are mandatory options (to be offered): - Maintenance contract (See section Maintenance contract option), - Additional warranty (+ 12 months) (See section Additional warranty) VTT does not commit to purchase the options. The price(s) of the option(s) are not taken into account when comparing tenders. PROCEDURE The contracting entity has suspended the previous procurement procedure VTT 24/206/2024 for the subject of the procurement. This is a new separate call for tenders. Annex 1 of the previous call for tenders has been updated slightly, as it was found that some of the requirements in section 3.1 were open to interpretation.

Submission Method
Electronic via:
https://tarjouspalvelu.fi/vtt?id=562687&tpk=24ead082-5cfa-4a60-8817-c0434c74fe27
Tenders may be submitted
Electronic submission: required
https://tarjouspalvelu.fi/vtt?id=562687&tpk=24ead082-5cfa-4a60-8817-c0434c74fe27
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
16/06/2025 11:01
Place of performance
FI1B1 Helsinki-Uusimaa
FI Suomi/Finland
CPV code

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Award method
Price 100 %
Estimated value
Not available
Final contracted value
Not available
Award of contract
Not available
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.