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Sweden-Lund: Laboratory, optical and precision equipments (excl. glasses) - EU tenders
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Sweden-Lund: Laboratory, optical and precision equipments (excl. glasses)

  • Published
    14/10/2022
  • Deadline
    11/11/2022
  • Opening of tenders
    12/11/2022
  • Awarded
    17/02/2023
  • Today
    15/07/2026
Status
Awarded
Type of contract
Supplies
Subject for Renewal
Yes
Buyer
Lunds universitet
Place of performance
NUTS code: SE224 Skåne län
Location of buyer
NUTS code: SE224 Skåne län
Business sector (Main CPV)
38000000 Laboratory, optical and precision equipments (excl. glasses)
Total estimated contract value (excluding VAT)
4,000,000.00 SEK
Total final contract value (excluding VAT)
4,000,000.00 SEK
Tender reference number
V 2022/2095
Description

Scope
Lund Nano Lab is planning to purchase an automated wafer processing cluster tool for spin coating and development. This system must contain process automation and be capable of performing sample preparation including adhesion promotion HMDS coating, resist spin-coating, sample baking and automated wet chemical development with minimum manual handling, via user-defined recipes. The system must be capable of handling several of our most sensitive and commonly used resists. A key attribute of the system will be the ability to form uniform and repeatable resist coating results and highly controlled development times of wafers post-exposure.
The tool must also contain several hotplates so that different temperatures can be programed simultaneously, and samples are transferred to these without user intervention via robotic arms.

Submission Method
Electronic via:
https://tendsign.com/doc.aspx?UniqueId=afmyaxhrax&GoTo=Tender
Tenders may be submitted
Submission for all lots
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
12/11/2022 00:00
Place of performance
Award method
The most economic tender
Estimated value
4,000,000.00 SEK
Final contracted value
4,000,000.00 SEK
Award of contract
Official name: LithExx-Systems GmbH
Postal address: Europastraße 8
Town: Villach / Austria
Postal code: A-9524
Country: AUT
Prior information
Contract
Award
Footnote - legal notice

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