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Etching system for deep silicon etching for MEMS - EU tenders
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Etching system for deep silicon etching for MEMS

Overview
  • Published
    13/08/2026
  • Deadline
    14/09/2026
  • Today
    15/09/2026
Status
Submission closed
Type of contract
Supplies
Subject for Renewal
No
Buyer
Ruhr-Universität Bochum
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: DEA51 Bochum, Kreisfreie Stadt
Business sector (Main CPV)
38000000 Laboratory, optical and precision equipments (excl. glasses)
Total estimated contract value (excluding VAT)
1,024,000.00 EUR
Total final contract value (excluding VAT)
Not available
Procedure details
Tender reference number
WD/2026/BVG00084528
Description

The Ruhr-Universität Bochum intends to procure a DRIE etching system, which will be used in the Microelectronics Bochum research laboratory for wafer substrates up to 200 mm in diameter. It will be used in the field of silicon-based micro-electromechanical systems (MEMS) for deep anisotropic silicon etching based on a cyclic etching process (DRIE, "BOSCH process") and will also serve to research new etching concepts that use less climate-damaging etching gases.

Submission Method
Electronic via:
https://www.evergabe.nrw.de/VMPSatellite/notice/CXPNYH7D2XQ
Tenders may be submitted
Electronic submission: required
https://www.evergabe.nrw.de/VMPSatellite/notice/CXPNYH7D2XQ
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
Not available
Place of performance
DEA51 Bochum, Kreisfreie Stadt
DE Deutschland
CPV code

38000000 - Laboratory, optical and precision equipments (excl. glasses)

22000000 - Printed matter and related products

Award method
Not available
Estimated value
1,024,000.00 EUR
Final contracted value
Not available
Award of contract
Not available
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.