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Awarded10/08/2026
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Today17/09/2026
Utilities
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Study on the use of laboratory-based EUV radiation sources to investigate degradation and contamination processes using in-situ measurement methods - Phase 2 - PR1171190-2310-I
Study on the use of laboratory-based EUV radiation sources for the investigation of degradation and contamination processes using in-situ measurement methods - Phase 2
38000000 - Laboratory, optical and precision equipments (excl. glasses)
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