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XUV Piezo Cluster - EU tenders
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- indicates CPV codes deduced from the text of the procedure

XUV Piezo Cluster

Overview
  • Published
    11/11/2024
  • Deadline
    13/01/2025
  • Opening of tenders
    14/01/2025
  • Today
    21/06/2025
Status
Submission closed
Type of contract
Supplies
Subject for Renewal
No
Buyer
Universiteit Twente
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: Not available
Business sector (Main CPV)
38000000 Laboratory, optical and precision equipments (excl. glasses)
Total estimated contract value (excluding VAT)
1,900,000.00 EUR
Total final contract value (excluding VAT)
Not available
Procedure details
Tender reference number
EB-OUT 6528
Description

The XUV Optics Group in MESA+ Institute at University of Twente tends to invest in the XUV Piezo Cluster to carry research on piezoelectric film-based sensors and actuators. The aim is to scale up the piezoelectric film coating capabilities to larger substrate dimensions with more advanced process control systems that enable to explore a broader process window. The XUV Piezo Cluster will be used for the deposition of pure metals, metallic oxides and piezoelectric layers onto various substrates to be further processed using photolithography and deposition steps in the MESA+ Nanolab facilities. Brief description of the capabilities is outlined below: The XUV Piezo Cluster shall be capable of processing at least 200 mm diameter substrates. The XUV Piezo Cluster shall include a chamber for deposition of piezoelectric Pb(Zr,Ti)O3 (PZT) layer that acts as the active layer for sensor and actuator applications. The XUV Piezo Cluster shall include a chamber or chambers for deposition of pure metals such as Pt, gold (Au) or conductive metal oxides such as LaNiO3 or SrRuO3 layers. The XUV Piezo Cluster shall have the capability to sputter the typically used Ti, Ta or Cr adhesion layers preceding the pure metal layers. The XUV Piezo Cluster shall include a load-lock chamber for fast sample loading and reaching of the base pressure. The XUV Piezo Cluster shall include a transfer chamber enabling the transfer of substrates between deposition chambers without breaking the vacuum. The XUV Piezo Cluster shall be further expandible to include a pre-treatment chamber for purposes such as degassing or etching before or after the layers are deposited. The full technical specifications can be found in ‘Appendix B: Schedule of Demands and Wishes’. Tenderers can derive no rights from the indicative specification. All amounts are specified excluding VAT.

Submission Method
Electronic via:
https://s2c.mercell.com/today/119146
Tenders may be submitted
Electronic submission: allowed
https://s2c.mercell.com/today/119146
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
14/01/2025 12:00
Place of performance
NL Nederland
Any country
CPV code

38000000 - Laboratory, optical and precision equipments (excl. glasses)

45000000 - Construction work CVP code deduced from the text of the procedure AI-generated

Award method
Not available
Estimated value
1,900,000.00 EUR
Final contracted value
Not available
Award of contract
Not available
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.