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Announced30/11/2017
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Estimated published15/03/2018
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Today28/08/2026
Utilities
Netherlands-Delft: Laboratory, optical and precision equipments (excl. glasses)
Market Consultation
The Kavli Nanolab would like to purchase an additional evaporation system of proven technology to expand the possibilities of the Kavli Nanolab. Also the production capacity must be expanded with a system with a similar throughput as our current system. This evaporation system will be meant for deposition of standard metal films, superconducting films and Josephson Junctions.
Main characteristics of the machine are:
— Maximum substrate size of 4 inch, with the possibility of smaller samples;
— 6 pockets, at least 60 cm distance to sample;
— Load lock, with plasma cleaning;
— LN2 cooling of sample holder;
— Automated sample tilt in main chamber and oxidation in load lock;
— Multi-user operation and multi-purpose applications;
— High reliability and high efficiency in operation and service support;
— Automated control of the process cycle;
— Easy replacement of target material, easy system maintenance;
— No service contract needed.
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