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Sputtering clusters - EU tenders
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  • Published
    14/04/2025
  • Today
    18/04/2025
  • Deadline
    12/05/2025
  • Opening of tenders
    12/05/2025
Status
Published
Type of contract
Supplies
Subject for Renewal
No
Buyer
Deutsches Zentrum für Luft- und Raumfahrt e.V. (DLR)
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: DEA23 Köln, Kreisfreie Stadt
Business sector (Main CPV)
31000000 Electrical machinery, apparatus, equipment and consumables; lighting
Total estimated contract value (excluding VAT)
Not available
Total final contract value (excluding VAT)
Not available
Tender reference number
ELVIS-ID E57787747
Description

As part of this tender, plants for a classic microstructuring process chain for the cleanroom are procured. Part of the process chain is the deposition and structuring of metallic, dielectric and semiconductor thin films on substrates with a maximum diameter of 150 mm. The tender includes a combination device with magnetron sputtering sources and an ion beam etching (IBE) system. The tender only covers the specified facilities, the media and peripherals required for this are provided separately by DLR. Further information can be found in the attached specifications (contract documents). Text automatically translated in your browsing language Automatically translated

Submission Method
Electronic via:
https://www.subreport.de/E57787747
Tenders may be submitted
Electronic submission: required
https://www.subreport.de/E26547481
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
12/05/2025 10:00
Award method
Criterion:
Type: price
Description: 50 %
Weight (percentage, exact):
Criterion:
Type: quality
Description: Zusammengesetzt aus: Qualität 30% Service 20%
Weight (percentage, exact):
Estimated value
Not available
Final contracted value
Not available
Award of contract
Not available
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.