The subject of this consultation is the acquisition, delivery, installation, commissioning and warranty of twenty-four (24) months of new inductively coupled reactive ion engraving (ICP-RIE) and capacitively coupled (CCP-RIE) machines. The consultation is divided into three (3) lots: - LOT 1: Supply, acquisition, delivery, installation, commissioning of one (1) new inductively coupled reactive ion engraving machine (ICP-RIE) and its twenty-four (24) month warranty on behalf of C2N-CNRS, - LOT 2: Supply, acquisition, delivery, installation and commissioning of one (1) new inductively coupled reactive ion engraving machine (ICP-RIE) with supply of the ALE module and its twenty-four (24) month warranty on behalf of the LAAS-CNRS, - LOT 3: Supply, acquisition, delivery, installation and commissioning of three (3) new reactive ion engraving machines with capacitive coupling (CCP-RIE) (ESSONNE France Department) on behalf of C2N-CNRS and I.FOTON-CNRS (distribution: Two (2) machines for C2N-CNRS and One (1) machine for I. FOTON-CNRS). The technical specifications are set out in the specific Technical and Special Specifications (TSS) for each lot. Each lot is a single-award framework agreement with purchase orders. Lots 1 and 2 include the purchase, delivery, installation, commissioning and twenty-four (24) month warranty of the machine and an annual maintenance contract for the main equipment and an annual maintenance contract for the interferometer (PSE 1 of Lot 1). As regards Lot 3: The framework agreement shall be executed exclusively by means of an order form. Order forms may be used to order: o Order form: ‘Supply, acquisition, delivery, installation, commissioning of a new RIECCP1 capacitive-coupled reactive ion engraving machine (CCP-RIE) on behalf of C2N-CNRS’ Order form: ‘Supply, acquisition, delivery, installation, commissioning of a new RIECCP2 capacitive-coupled reactive ion engraving machine (CCP-RIE) on behalf of C2N-CNRS’ Order form: ‘Supply, acquisition, delivery, installation, commissioning of a new RIECCP2 reactive ion engraving machine with capacitive coupling (CCP-RIE) on behalf of I. FOTON-CNRS o Order form: Annual maintenance contract for RIECCP1 equipment on behalf of C2N-CNRS o Order form: Annual maintenance contract for RIECCP2 equipment on behalf of C2N-CNRS o Order form: Annual maintenance contract for the equipment on behalf of I.FOTON- CNRS Optional additional services (PSE) are provided for Lot 1 and Lot 3. Each framework agreement is concluded with a minimum and maximum quantity in accordance with Article R2162-4 1° of the Public Procurement Code. The contract is part of the investment project for technology platforms under the PEPR Electronics programme and the RENATECH project. As regards the places of delivery/performance (see Article 5 "lot" of this notice). The place of delivery/performance differs according to the lots. Lot 3 has two places of delivery/performance.
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