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Supply of deposition equipment dedicated to the metal filling of low temperature vias - EU tenders
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Supply of deposition equipment dedicated to the metal filling of low temperature vias

Overview
  • Published
    01/07/2026
  • Deadline
    31/07/2026
  • Today
    14/08/2026
Status
Submission closed
Type of contract
Supplies
Subject for Renewal
No
Buyer
CEA Grenoble
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: FRK24 Isère
Business sector (Main CPV)
31712100 Microelectronic machinery and apparatus
Total estimated contract value (excluding VAT)
Not available
Total final contract value (excluding VAT)
Not available
Procedure details
Tender reference number
B26-02145-CMF
Description

For its research activities, which aim to develop 10nm FDSOI technologies and beyond, CEA-Leti wishes to acquire equipment dedicated to the metal filling of low-temperature vias, for memory applications, for its white room. The equipment will be capable of using 300mm wafers and is intended for the deposition of high-conformity fine tungsten film in vias with a high form factor. The contract envisaged includes one option with compulsory encryption and four options with optional encryption: - Option with mandatory enumeration: . Option 3 (optional service): Maintenance training level 1 – Options with optional enumeration: . Option 1 (optional supply): Heat exchangers / chillers . Option 2 (optional supply): . Power Supply Transformer Option 4 (optional service): Advanced Maintenance Training . Option 5 (optional service): One year warranty extension

Submission Method
Electronic via:
https://www.marchespublics.gouv.fr
Tenders may be submitted
Electronic submission: required
https://www.marchespublics.gouv.fr
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
Not available
Place of performance
FRK24 Isère
FR France
CPV code

31712100 - Microelectronic machinery and apparatus

Award method
Criterion:
Type: price
Description: Le prix n'est pas le seul critère d'attribution et tous les critères sont énoncés uniquement dans les documents du marché.
Weight (percentage, exact):
Estimated value
Not available
Final contracted value
Not available
Award of contract
Not available
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.