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Published19/07/2019
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Deadline13/09/2019
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Canceled04/11/2019
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Today16/07/2026
Utilities
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France-Grenoble: Microelectronic machinery and apparatus and microsystems
CEA-LETI wishes to acquire an optical attack end detection system with multiple wavelengths for mechanical and chemical polishing (MPC) operations. This system will be used for Front-End microelectronic applications on materials such as silicon or silicon oxide. This system will be installed on CMP Applied Materials LK Prime equipment currently in service in the CEA-LETI clean room.
Official name: CEA — Grenoble
Postal address: 17 rue des Martyrs
Town: Grenoble
NUTS code: FRK24
Postal code: 38054
Country: FRA
Contact person: Mme A. Mangin
Main address: www.cea.fr
Electronic via:
https://www.marches-publics.gouv.fr
31712000 - Microelectronic machinery and apparatus and microsystems
38000000 - Laboratory, optical and precision equipments (excl. glasses)
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