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202501100951 Acquisition, delivery, installation and commissioning of a capacitively coupled reactive ion etching system (RIE - CCP) using fluorinated gases - EU tenders
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202501100951 Acquisition, delivery, installation and commissioning of a capacitively coupled reactive ion etching system (RIE - CCP) using fluorinated gases Text automatically translated in your browsing language Automatically translated

Overview
  • Published
    14/02/2025
  • Deadline
    18/03/2025
  • Today
    20/03/2025
Status
Submission closed
Type of contract
Supplies
Subject for Renewal
No
Buyer
CNRS Délégation Régionale Hauts-de-France
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: FRE11 Nord
Business sector (Main CPV)
22520000 Dry-etching equipment
Total estimated contract value (excluding VAT)
750,000.00 EUR
Total final contract value (excluding VAT)
Not available
Procedure details
Tender reference number
202501100951
Description

The subject of this contract concerns the acquisition, delivery and commissioning of two reactive plasma ion engraving devices of the RIE-CCP type using fluorinated gases or dioxygen. One of the two reactors will be dedicated to the exclusive engraving of SixNy, SiO2 and Si materials with a resin mask (called RIE_1), the second will be open to the engraving of the same materials and also of all materials that can be engraved by a plasma obtained from fluorinated gases or dioxygen (called RIE_2). Text automatically translated in your browsing language Automatically translated

Submission Method
Electronic via:
https://www.marches-publics.gouv.fr/?page=Entreprise.EntrepriseAdvancedSearch&AllCons&id=2686289&orgAcronyme=f2h
Tenders may be submitted
Electronic submission: required
https://www.marches-publics.gouv.fr/?page=Entreprise.EntrepriseAdvancedSearch&AllCons&id=2686289&orgAcronyme=f2h
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
Not available
Place of performance
FR France
FRE11 Nord
CPV code

22520000 - Dry-etching equipment

33600000 - Pharmaceutical products CVP code deduced from the text of the procedure AI-generated

33000000 - Medical equipments, pharmaceuticals and personal care products CVP code deduced from the text of the procedure AI-generated

Award method
Criterion:
Type: price
Description: Prix
Weight (percentage, exact): 35
Criterion:
Type: quality
Description: Valeur technique
Weight (percentage, exact): 40
Criterion:
Type: quality
Description: Délais, installation et formation
Weight (percentage, exact): 10
Criterion:
Type: quality
Description: Garantie, SAV et procédés
Weight (percentage, exact): 10
Criterion:
Type: quality
Description: Valeur environnementale
Weight (percentage, exact): 5
Estimated value
750,000.00 EUR
Final contracted value
Not available
Award of contract
Not available
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.