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Electron beam lithography (EBL) and laser beam lithography (LBL) systems - EU tenders
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Electron beam lithography (EBL) and laser beam lithography (LBL) systems

Overview
  • Published
    09/04/2025
  • Deadline
    12/05/2025
  • Opening of tenders
    13/05/2025
  • Today
    18/05/2025
Status
Submission closed
Type of contract
Supplies
Subject for Renewal
No
Buyer
University of Jyväskylä
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: FI193 Keski-Suomi
Business sector (Main CPV)
38000000 Laboratory, optical and precision equipments (excl. glasses)
Total estimated contract value (excluding VAT)
Not available
Total final contract value (excluding VAT)
Not available
Number of lots
2
Procedure details
Tender reference number
49/02.03.00.00/2025
Description

University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for research and development of state of the art micro- and nano-scale features requiring high fidelity in patterning and edge smoothness. Contracting authority has a need for high precision and versatile lithography tools for patterning of optical wave guides and lattices, phononic crystals and mechanic resonators; with the goal of investigating quantum phenomena and the interplay between such structures. Contracting authority has a need for the lithography tools to support integration of high fidelity nano-scale features into considerably larger designs, such as microfluidic networks with widths of about 100 um and lengths of several mm. Therefore, contracting authority puts emphasis on the two lithography systems having good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures on the same resist layer. The EBL and LBL systems should manage mix-and-match exposures with resists such as Shipley S1813, SU-8 and AZ5200-E series. Prior references of supplying comparable systems are required. Contracting authority (JYU) may suspend the procurement procedure if the price level of the tenders exceeds the budget available for the procurement

Submission Method
Electronic via:
https://tarjouspalvelu.fi/jyu?id=554652&tpk=f5818810-6526-450c-9dc2-46e72a8a5aec
Tenders may be submitted
Electronic submission: required
https://tarjouspalvelu.fi/jyu?id=554652&tpk=f5818810-6526-450c-9dc2-46e72a8a5aec
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
13/05/2025 09:00
Place of performance
FI193 Keski-Suomi
FI Suomi/Finland
Any country
CPV code

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Lots (2)
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.