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Plasma ashing system - EU tenders
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Overview
  • Published
    05/06/2025
  • Deadline
    11/07/2025
  • Opening of tenders
    11/07/2025
  • Today
    17/07/2025
Status
Submission closed
Type of contract
Supplies
Subject for Renewal
No
Buyer
Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: DE21H München, Landkreis
Business sector (Main CPV)
38000000 Laboratory, optical and precision equipments (excl. glasses)
Total estimated contract value (excluding VAT)
Not available
Total final contract value (excluding VAT)
Not available
Procedure details
Tender reference number
BAdW-WMI-2025-1
Description

The Walther Meissner Institute (WMI) intends to acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection. Text automatically translated in your browsing language Automatically translated

Submission Method
Electronic via:
https://www.dtvp.de/Satellite/notice/CXP4YZ85Z10
Tenders may be submitted
Electronic submission: required
https://www.dtvp.de/Satellite/notice/CXP4YZ85Z10
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
11/07/2025 12:01
Place of performance
DE Deutschland
DE21H München, Landkreis
CPV code

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Award method
Preis
Estimated value
Not available
Final contracted value
Not available
Award of contract
Not available
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.