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Supply, installation and commissioning of an Electron Beam Lithography tool up to 8-inch wafers (UPV04) and an SEM equipment (UPV13) for the UPV Pilot Line - EU tenders
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Supply, installation and commissioning of an Electron Beam Lithography tool up to 8-inch wafers (UPV04) and an SEM equipment (UPV13) for the UPV Pilot Line

Overview
  • Published
    21/07/2026
  • Today
    10/08/2026
  • Deadline
    15/09/2026
  • Opening of tenders
    16/09/2026
Status
Published
Type of contract
Supplies
Subject for Renewal
No
Buyer
Rectorado de la Universitat Politècnica de València
Place of performance
NUTS code: Multiple place of performance
Location of buyer
NUTS code: ES523 Valencia / València
Business sector (Main CPV)
31712110 Electronic integrated circuits and microassemblies
Total estimated contract value (excluding VAT)
4,242,784.00 EUR
Total final contract value (excluding VAT)
Not available
Procedure details
Tender reference number
MY26/ITEAM/S/55
Description

The procurement covered by this file is necessary in order to carry out research and development work for the UPV Pilot Line, with the aim of upgrading existing advanced pilot lines and developing new ones across the Union, to enable the development and deployment of state-of-the-art semiconductor technologies and next generation semiconductor technologies. To this end, it is necessary to purchase, inter alia, the following equipment: 4 • UPV04 - Electron beam lithography tool up to 8-inch wafers: Electron beam lithography equipment that exposes patterns in sensitive resistors by means of a focused and scanned electron beam. Writes features with nanometric resolution according to design in digital file. Dedicated to nanofabrication patronage, especially for masks and structures in photonics, semiconductors and nanotechnology. • UPV13 – SEM: Surface inspection equipment using a focused electron beam that delivers nano-resolution images. It allows obtaining morphological and surface contrast information, as well as contrast associated with differences in composition or atomic number, depending on the detectors and image modes available. Dedicated to metrology, inspection and validation of process and quality control. The suitability of the equipment is based on its ability to jointly cover the patterning and dedicated metrology requirements necessary for the pilot in-line manufacture of hybrid integrated photonic circuits. This capability makes it possible to coordinate the definition of exposure parameters and points of interest for subsequent metrology, integrate post-process external SEM inspection and ensure the traceability and consistency of the data generated during the manufacturing flow.

Submission Method
Electronic via:
https://contrataciondelestado.es/wps/poc?uri=deeplink:detalle_licitacion&idEvl=jayWHYFP59I36J9Lctlsuw%3D%3D
Tenders may be submitted
Electronic submission: required
https://contrataciondelestado.es/wps/poc?uri=deeplink:detalle_licitacion&idEvl=jayWHYFP59I36J9Lctlsuw%3D%3D
Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)
Not available
Conditions for opening tenders (date)
16/09/2026 09:00
Place of performance
ES España
ES523 Valencia / València
CPV code

31712110 - Electronic integrated circuits and microassemblies

38500000 - Checking and testing apparatus

38000000 - Laboratory, optical and precision equipments (excl. glasses)

Award method
Criterion:
Type: quality
Description: DETECCIÓN AUTOMÁTICA DE ALTURA Y CORRECCIÓN DEL PLANO FOCAL.
Weight (percentage, exact): 4
Criterion:
Type: quality
Description: ESTACIÓN AVANZADA DE PRE-ALINEAMIENTO (PRE-ALIGNMENT STATION).
Weight (percentage, exact): 10
Criterion:
Type: quality
Description: ESTACIÓN DE VALIDACIÓN DE RECETAS DE PROCESO (EMULADOR).
Weight (percentage, exact): 10
Criterion:
Type: quality
Description: GENERADOR DE ESCANEO CON CORRECCIÓN DE DISTORSIÓN EN TIEMPO REAL.
Weight (percentage, exact): 6
Criterion:
Type: quality
Description: MÓDULO DE ROTACIÓN E INCLINACIÓN (TILT) PARA INSPECCIÓN.
Weight (percentage, exact): 4
Criterion:
Type: price
Description: OFERTA ECONÓMICA: PRECIO.
Weight (percentage, exact): 66
Estimated value
4,242,784.00 EUR
Final contracted value
Not available
Award of contract
Not available
Documents
Prior information
Contract
Award
Footnote - legal notice

This content published on this page is meant purely as an additional service and has no legal effect. The Union's institutions do not assume any liability for its contents. The official versions of the relevant tendering notices are those published in the Supplement of Official Journal of the European Union and available in TED. Those official texts are directly accessible through the links embedded in this page. For more information please see Public Procurement Explainability and Liability notice.